Planar Semiconductor Sensor

Planar Semiconductor Sensor

          Detects the change in resistance accompanying the gas detection reaction on thick-film semiconductor surfaces a few micrometers to tens of micrometers thick.

 Detection Principle

Features

• More sensitive than the semiconductor sensor.
• Selective to gases（Cl₂, H₂S, EO, etc.）
• Self-cleaning effect on the surface ensuring high repeatability and long-term stability due to high working temperature.